Mark neisser and stefan wurm itrs lithography roadmap. The international technology roadmap for semiconductors itrs is a set of documents. International technology roadmap for semiconductors, 2007. International technology roadmap for semiconductors wikiwand. International technology roadmap for semiconductors itrs. The international technology roadmap for semiconductors itrs is a set of documents produced by a group of. The metrology topics covered in the 2015 metrology roadmap are microscopy. Next to euv source power, enabling defectfree euv masks and. The system driver models for microprocessor mpu and systemonchip soc in the international technology roadmap for semiconductors 21 itrs determine the roadmap of underlying technology. Technology workgroup of itrs and used those as calibration factors to match. The international technology roadmap for semiconductors itrs provides the semiconductor industry with the timing of critical technology needs for future generations of integrated circuits. Japan electronics and information technology industries association.
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